High-resolution hard X-ray phase-contrast microscopy with a large-diameter and high-numerical-aperture zone plate

被引：23

作者：

Kagoshima, Y

Yokoyama, Y

Ibuki, T

Niimi, T

Tsusaka, Y

Takai, K

Matsui, J

机构：

[1] Himeji Inst Technol, Fac Sci, Ako, Hyogo 6781297, Japan

[2] Japan Synchrotron Radiat Res Inst, Sayo, Hyogo 6795198, Japan

来源：

JOURNAL OF SYNCHROTRON RADIATION | 2002年 / 9卷

关键词：

X-ray microscopes; zone plates; high resolution; phase contrast;

D O I：

10.1107/S0909049502003758

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

An imaging transmission hard X-ray microscope has been constructed at beamline BL24XU of SPring-8. It makes use of a phase zone plate made of tantalum with a diameter of 1 mm and an outermost zone width of 50 nm, aiming at a wide field of view and a high spatial resolution. The performance test was carried out at a photon energy of 10 keV. A field of view as wide as similar to200 mm in diameter was achieved. The spatial resolution was measured to be 220 nm by analyzing a knife-edge image. Further, a line-and-space pattern as fine as 100 nm could be imaged. By placing a phase plate made of gold in the back focal plane of the zone plate, phase-contrast microscopy using Zernike's method was also carried out. The feasibility of phase-contrast microscopy for observing transparent samples was successfully demonstrated by imaging small polystyrene particles.

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收藏

页码：132 / 135

页数：4

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