Formation of patterned microstructures of polycrystalline ceramics from precursor polymers using micromolding in capillaries

被引:33
作者
Beh, WS
Xia, YN [1 ]
Qin, D
机构
[1] Univ Washington, Dept Chem, Seattle, WA 98195 USA
[2] Univ Washington, Ctr Nanotechnol, Seattle, WA 98195 USA
关键词
D O I
10.1557/JMR.1999.0540
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Micromolding in capillaries has been used to generate patterned microstructures of ZrO2 or SnO2 from its polymeric precursor. After patterning, the amorphous precursor was converted into the desired polycrystalline ceramic material by calcination in air at 460 degrees C. The final phase for each ceramic material was determined by powder x-ray diffraction, The shrinkage of the precursor material during pyrolysis was investigated by scanning electron microscopy and atomic force microscopy. These ceramic microstructures could be either supported on solid substrates or released as freestanding fibers and membranes. Their lateral dimensions could be as small as approximately 500 nm.
引用
收藏
页码:3995 / 4003
页数:9
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