PHOTOLITHOGRAPHIC MICROMOLDING OF CERAMICS USING PLASMA-ETCHED POLYIMIDE PATTERNS

[1] Becker E. W., 1986, Microelectronic Engineering, V4, P35, DOI 10.1016/0167-9317(86)90004-3

[2] Furuya A., 1993, Proceedings. IEEE. Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.93CH3265-6), P59, DOI 10.1109/MEMSYS.1993.296952

[3] EFFICIENT SYNTHETIC APERTURE IMAGING FROM A CIRCULAR APERTURE WITH POSSIBLE APPLICATION TO CATHETER-BASED IMAGING [J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1992, 39 (03) : 366 - 380

[4] SELECTIVE ETCHING OF BILAYER PHOTORESIST USING A MULTIPOLAR ELECTRON-CYCLOTRON RESONANCE SOURCE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1992, 139 (12) : 3599 - 3602

[1] Becker E. W., 1986, Microelectronic Engineering, V4, P35, DOI 10.1016/0167-9317(86)90004-3

[2] Furuya A., 1993, Proceedings. IEEE. Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.93CH3265-6), P59, DOI 10.1109/MEMSYS.1993.296952

[3] EFFICIENT SYNTHETIC APERTURE IMAGING FROM A CIRCULAR APERTURE WITH POSSIBLE APPLICATION TO CATHETER-BASED IMAGING [J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1992, 39 (03) : 366 - 380

[4] SELECTIVE ETCHING OF BILAYER PHOTORESIST USING A MULTIPOLAR ELECTRON-CYCLOTRON RESONANCE SOURCE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1992, 139 (12) : 3599 - 3602