Grazing incidence specular reflectivity: theory, experiment, and applications

被引：75

作者：

van der Lee, A ^{[1
]}

机构：

[1] Lab Mat & Procedes Membranaires, UMR CNRS 5635, F-34296 Montpellier 5, France

来源：

SOLID STATE SCIENCES | 2000年 / 2卷 / 02期

关键词：

61.10.Kw X-ray reflectometry (surfaces; interfaces; films); 68.35.Ct interface structure and roughness; 68.55.Jk structure and morphology; thickness;

D O I：

10.1016/S1293-2558(00)00119-9

中图分类号：

O61 [无机化学];

学科分类号：

070301 ; 081704 ;

摘要：

An overview is given of the theory and experimental implementation of grazing incidence specular reflectivity. Special attention is paid to the latest developments in data analysis methods. The overview is completed by a number of experimental studies showing the possibilities of grazing incidence reflectivity in thin him characterization. (C) 2000 Editions scientifiques et medicales Elsevier SAS. All rights reserved.

引用

页码：257 / 278

页数：22

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