Mapping of the reciprocal network on epitaxial thin layers using a setup with a curved-position sensitive detector

被引:1
作者
Guinebretière, R [1 ]
Boulle, A [1 ]
Masson, O [1 ]
Dauger, A [1 ]
机构
[1] ENSCI, UMR 6638, Equipe Org Struct Mutiechelle Mat, F-87065 Limoges, France
来源
JOURNAL DE PHYSIQUE IV | 2002年 / 12卷 / PR6期
关键词
D O I
10.1051/jp4:20020236
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
two-dimensional distributions of intensity diffracted by epitaxial layers have been measured using a setup associating a four reflections monochromator and a curved position sensitive detector. Microstructural parameters of oxide thin films elaborated by sol-gel route were evaluated by profile modeling of different sections of reciprocal space maps of several reflections.
引用
收藏
页码:273 / 281
页数:9
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