A simple model for quantum mechanical effects in hole inversion layers in silicon PMOS devices

被引:18
作者
Hareland, SA
Jallepalli, S
Chindalore, G
Shih, WK
Tasch, AF
Maziar, CM
机构
[1] Department of Electrical and Computer Engineering, Microelectronics Research Center, University of Texas at Austin, Austin
关键词
D O I
10.1109/16.595947
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The effects of quantization of the inversion layer of MOSFET devices is an area of increasing importance as technology is aggressively scaled below 0.25 mu m. Although electron inversion layers have attracted considerable interest, very little work has been reported for holes, This paper describes the implementation and results of a simple, computationally efficient model, appropriate for device simulators, for predicting the effects of hole inversion layer quantization, This model compares very favorably with experimental results and the predictions of a full-band, self-consistent Schrodinger-Poisson solver.
引用
收藏
页码:1172 / 1173
页数:2
相关论文
共 11 条
[1]   Experimental determination of threshold voltage shifts due to quantum mechanical effects in MOS electron and hole inversion layers [J].
Chindalore, G ;
Hareland, SA ;
Jallepalli, S ;
Tasch, AF ;
Maziar, CM ;
Chia, VKF ;
Smith, S .
IEEE ELECTRON DEVICE LETTERS, 1997, 18 (05) :206-208
[2]  
CHINDALORE G, 1997, P IEEE 1997 INT C MI, P165
[3]   CARRIER TRANSPORT NEAR THE SI/SIO2 INTERFACE OF A MOSFET [J].
HANSCH, W ;
VOGELSANG, T ;
KIRCHER, R ;
ORLOWSKI, M .
SOLID-STATE ELECTRONICS, 1989, 32 (10) :839-849
[4]   A computationally efficient model for inversion layer quantization effects in deep submicron N-channel MOSFET's [J].
Hareland, SA ;
Krishnamurthy, S ;
Jallepalli, S ;
Yeap, CF ;
Hasnat, K ;
Tasch, AF ;
Maziar, CM .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1996, 43 (01) :90-96
[5]   Quantization effects in inversion layers of PMOSFET's on Si(100) substrates [J].
Hu, CY ;
Banerjee, S ;
Sadra, K ;
Streetman, BG ;
Sivan, R .
IEEE ELECTRON DEVICE LETTERS, 1996, 17 (06) :276-278
[6]  
JALLEPALLI S, 1996, VLSI S, P138
[7]  
MOGLESTUE C, 1986, J APPL PHYS, V59
[8]   QUANTUM EFFECTS IN SI N-MOS INVERSION LAYER AT HIGH SUBSTRATE CONCENTRATION [J].
OHKURA, Y .
SOLID-STATE ELECTRONICS, 1990, 33 (12) :1581-1585
[9]  
RIOS R, 1994, INTERNATIONAL ELECTRON DEVICES MEETING 1994 - IEDM TECHNICAL DIGEST, P613, DOI 10.1109/IEDM.1994.383335
[10]   SELF-CONSISTENT RESULTS FOR N-TYPE SI INVERSION LAYERS [J].
STERN, F .
PHYSICAL REVIEW B, 1972, 5 (12) :4891-&