Multiple ink nanolithography: Toward a multiple-pen nano-plotter

被引:454
作者
Hong, SH
Zhu, J
Mirkin, CA
机构
[1] Northwestern Univ, Dept Chem, Evanston, IL 60208 USA
[2] Northwestern Univ, Ctr Nanofabricat & Mol Self Assembly, Evanston, IL 60208 USA
关键词
D O I
10.1126/science.286.5439.523
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
The formation of intricate nanostructures will require the ability to maintain surface registry during several patterning steps. A scanning probe method, dip-pen nanolithography (DPN), can be used to pattern monolayers of different organic molecules down to a 5-nanometer separation. An "overwriting" capability of DPN allows one nanostructure to be generated and the areas surrounding that nanostructure to be filled in with a second type of "ink."
引用
收藏
页码:523 / 525
页数:3
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