Real-time shape measurement by integrated phase-shifting method

被引：34

作者：

Morimoto, Y ^{[1
]}

Fujigaki, M ^{[1
]}

Toda, H ^{[1
]}

机构：

[1] Wakayama Univ, Fac Syst Engn, Dept OptoMechatron, Wakayama 6408510, Japan

来源：

INTERFEROMETRY '99: TECHNIQUES AND TECHNOLOGIES | 1999年 / 3744卷

关键词：

real-time; shape; phase-shifting; phase analysis; integrated phase-shifting method;

D O I：

10.1117/12.357702

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Phase distribution analysis of deformed gratings in moire method and grating projection method provides accurate shape of specimen. We previously proposed the phase-shifting method using correlation with a rectangular function. The phase analysis uses many images during phase shifting of the projected grating. In this paper, we propose a new real-time phase analysis method, that is, the integrated phase-shifting method using four images of phase-shifted grating patterns with a rectangular brightness distribution. The theory and some applications to shape measurement are shown.

引用

页码：118 / 125

页数：8

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