Video-rate fringe analyzer based on phase-shifting electronic moire patterns

被引:52
作者
Kato, J [1 ]
Yamaguchi, I [1 ]
Nakamura, T [1 ]
Kuwashima, S [1 ]
机构
[1] OHYOH KEISOKU KENKYUSHO OKK INC, OHTU KU, TOKYO 145, JAPAN
关键词
fringe analysis; interferometry; moire techniques;
D O I
10.1364/AO.36.008403
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We have developed a fringe analyzer that delivers the phase distribution at a video rate from a fringe pattern containing a spatial carrier. It is based on parallel generations of three phase-shifted moire patterns through electronic multiplication with computer-generated reference gratings and low-pass filtering. The phase distribution is derived by the subsequent parallel processing of these patterns on the basis of a three-step phase-shifting algorithm. By modification of the bias phase distribution of the reference gratings, several functions, such as correction of an initial wave-front error, are realized in real time. The usefulness of this analyzer is demonstrated experimentally for phase measurements by grating-projection surface topography and interferometry. (C) 1997 Optical Society of America.
引用
收藏
页码:8403 / 8412
页数:10
相关论文
共 21 条
  • [1] High-speed fringe analysis method using frequency demodulation technology
    Arai, Y
    Yokozeki, S
    Shiraki, K
    Yamada, T
    [J]. OPTICAL ENGINEERING, 1996, 35 (08) : 2341 - 2344
  • [2] DIGITAL WAVEFRONT MEASURING INTERFEROMETER FOR TESTING OPTICAL SURFACES AND LENSES
    BRUNING, JH
    HERRIOTT, DR
    GALLAGHER, JE
    ROSENFELD, DP
    WHITE, AD
    BRANGACCIO, DJ
    [J]. APPLIED OPTICS, 1974, 13 (11) : 2693 - 2703
  • [3] Creath K., 1988, Progress in optics. Vol.XXVI, P349, DOI 10.1016/S0079-6638(08)70178-1
  • [4] DIRECT PHASE DETECTING SYSTEM
    ICHIOKA, Y
    INUIYA, M
    [J]. APPLIED OPTICS, 1972, 11 (07): : 1507 - &
  • [5] SCANNING MOIRE METHOD AND AUTOMATIC-MEASUREMENT OF 3-D SHAPES
    IDESAWA, M
    YATAGAI, T
    SOMA, T
    [J]. APPLIED OPTICS, 1977, 16 (08) : 2152 - 2162
  • [6] ANALYSIS OF THE PHASE UNWRAPPING ALGORITHM
    ITOH, K
    [J]. APPLIED OPTICS, 1982, 21 (14): : 2470 - 2470
  • [7] KATO J, 1988, P SOC PHOTO-OPT INS, V1032, P791
  • [8] KATO J, 1993, JPN SOC PREC ENG, V59, P141
  • [9] KATO J, 1993, FRINGE 93, P66
  • [10] KUCHEL M, 1990, P SOC PHOTO-OPT INS, V1332, P655