Expansion of the ablation plume created by ultraviolet laser irradiation of various target materials

被引:16
作者
Angleraud, B [1 ]
Aubreton, J [1 ]
Catherinot, A [1 ]
机构
[1] Fac Sci, CNRS, UPRESA 6015, F-87060 Limoges, France
关键词
D O I
10.1051/epjap:1999143
中图分类号
O59 [应用物理学];
学科分类号
摘要
The plasma plume created during photoablation of various targets by an excimer KrF laser beam is studied in typical conditions of pulsed laser film deposition. For the examination of transport phenomena of ejected species, the space and time resolved evolution of the luminous plume is investigated by fast imaging as a function of laser fluence (from 7 to 200 J/cm(2)) and nitrogen background pressure (from 5 x 10(-3) to 500 Pa) for five different target materials (boron nitride, graphite, alumina, molybdenum, a superconducting oxide YBCO). Under "vacuum" (5 x 10(-3) Pa) and for nitrogen background pressures up to 10(-1)-1 Pa, the plume expands freely. For higher background pressures (greater than or equal to 10 Pa), three successive regions above the target can be distinguished: at first the expansion is free, then the plume expands according to a shock wave-like behaviour, and lastly a drag force model correctly describes the plume shape evolution. Velocities of the luminous plasma front and of the "mass center" of the plume are determined versus laser fluence and background nitrogen gas pressure.
引用
收藏
页码:303 / 310
页数:8
相关论文
共 40 条
  • [1] LASER-INDUCED PLASMA FORMATION DURING PULSED-LASER DEPOSITION
    ADEN, M
    KREUTZ, EW
    VOSS, A
    [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1993, 26 (10) : 1545 - 1553
  • [2] LASER-INDUCED VAPORIZATION OF A METAL-SURFACE
    ADEN, M
    BEYER, E
    HERZIGER, G
    KUNZE, H
    [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1992, 25 (01) : 57 - 65
  • [3] ANDLERAUD B, 1995, THESIS U LIMOGES FRA
  • [4] Study of the expansion of the laser ablation plume above a boron nitride target
    Angleraud, B
    Girault, C
    Champeaux, C
    Garrelie, F
    Germain, C
    Catherinot, A
    [J]. APPLIED SURFACE SCIENCE, 1996, 96-8 : 117 - 121
  • [5] ANGLERAUD B, 1994, ESCAMPIG 94, V12, P304
  • [6] ANISIMOV SI, 1968, SOV PHYS JETP-USSR, V27, P182
  • [7] BOYD I, 1987, SPRINGER SERIES MAT
  • [8] BOYD IW, 1990, SURF PROC LAS ASS CH
  • [9] CATHERINOT A, 1995, NATO ASI SERIES
  • [10] INSITU GROWTH OF YBACUO SUPERCONDUCTING THIN-FILMS BY EXCIMER-LASER ABLATION - INFLUENCE OF DEPOSITION AND COOLING PARAMETERS
    CHAMPEAUX, C
    MARCHET, P
    AUBRETON, J
    MERCURIO, JP
    CATHERINOT, A
    [J]. APPLIED SURFACE SCIENCE, 1993, 69 (1-4) : 335 - 339