Lateral templating for guided self-organization of sputter morphologies

被引：63

作者：

Cuenat, A

George, HB

Chang, KC

Blakely, JM

Aziz, MJ ^{[1
]}

机构：

[1] Harvard Univ, Div Engn & Appl Sci, Cambridge, MA 02138 USA

[2] Cornell Univ, Ctr Mat Sci, Ithaca, NY 14853 USA

来源：

ADVANCED MATERIALS | 2005年 / 17卷 / 23期

关键词：

D O I：

10.1002/adma.200500717

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Spontaneously emerging topographic patterns on a Si(100) substrate are guided to develop long-range order (see Figure) by using prefabricated boundaries on the area on which they organize. The density of topological defects, such as dislocations, is minimized when the ratio of the spacing between boundaries to the naturally arising spatial period is near an integer value.

引用

收藏

页码：2845 / +

页数：6

相关论文

共 39 条

[21] THRESHOLD SELECTION METHOD FROM GRAY-LEVEL HISTOGRAMS [J].

OTSU, N .

IEEE TRANSACTIONS ON SYSTEMS MAN AND CYBERNETICS, 1979, 9 (01) :62-66

[22] Block copolymer lithography: Periodic arrays of similar to 10(11) holes in 1 square centimeter [J].

Park, M ;

Harrison, C ;

Chaikin, PM ;

Register, RA ;

Adamson, DH .

SCIENCE, 1997, 276 (5317) :1401-1404

[23] Dynamics of ripple formation in sputter erosion:: Nonlinear phenomena [J].

Park, S ;

Kahng, B ;

Jeong, H ;

Barabási, AL .

PHYSICAL REVIEW LETTERS, 1999, 83 (17) :3486-3489

[24] Combining advanced lithographic techniques and self-assembly of thin films of diblock copolymers to produce templates for nanofabrication [J].

Peters, RD ;

Yang, XM ;

Wang, Q ;

de Pablo, JJ ;

Nealey, PF .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (06) :3530-3534

[25] Propagation of nanopatterned substrate templated ordering of block copolymers in thick films [J].

Rockford, L ;

Mochrie, SGJ ;

Russell, TP .

MACROMOLECULES, 2001, 34 (05) :1487-1492

[26] Ripple structure on Ag(110) surface induced by ion sputtering [J].

Rusponi, S ;

Boragno, C ;

Valbusa, U .

PHYSICAL REVIEW LETTERS, 1997, 78 (14) :2795-2798

[27] Self-assembled semiconductor nanostructures:: climbing up the ladder of order [J].

Schmidt, OG ;

Kiravittaya, S ;

Nakamura, Y ;

Heidemeyer, H ;

Songmuang, R ;

Müller, C ;

Jin-Phillipp, NY ;

Eberl, K ;

Wawra, H ;

Christiansen, S ;

Gräbeldinger, H ;

Schweizer, H .

SURFACE SCIENCE, 2002, 514 (1-3) :10-18

[28]

Segalman RA, 2001, ADV MATER, V13, P1152, DOI 10.1002/1521-4095(200108)13:15<1152::AID-ADMA1152>3.0.CO

[29]

2-5

[30] Spontaneous ordering of nanostructures on crystal surfaces [J].

Shchukin, VA ;

Bimberg, D .

REVIEWS OF MODERN PHYSICS, 1999, 71 (04) :1125-1171

← 1 2 3 4 →