Annealing effects of CuInSe2 films prepared by pulsed laser deposition

被引：19

作者：

Kuranouchi, S ^{[1
]}

Yoshida, A ^{[1
]}

机构：

[1] Toyohashi Univ Technol, Tempaku Ku, Toyohashi, Aichi 4418580, Japan

来源：

THIN SOLID FILMS | 1999年 / 343卷

关键词：

laser ablation; annealing; solar cells; semiconductors;

D O I：

10.1016/S0040-6090(98)01643-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The influence of annealing processes on the CuInSe2(CIS) films prepared by pulsed laser deposition (PLD) has been investigated. The CIS films deposited on Coming 7059 glasses at various substrate temperatures were accepted annealing. The composition of annealed films was Cu-rich and no significant loss of selenium was observed. The X-ray diffraction patterns of the films were drastically changed after annealing the films deposited at room temperature. The post annealing process brings high orientation with the (112) plane of the chalcopyrite structure along the substrate surface. The compositional depth profile of the films was also changed after annealing. The growth of Cu-rich surface layer was observed. The liquid(CuxSe)-solid(CIS) growth mechanism was suggested and the CIS grain growth was enhanced. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：123 / 126

页数：4

共 6 条

[1] PREPARATION OF Y-BA-CU OXIDE SUPERCONDUCTOR THIN-FILMS USING PULSED LASER EVAPORATION FROM HIGH-TC BULK MATERIAL [J].

DIJKKAMP, D ;

VENKATESAN, T ;

WU, XD ;

SHAHEEN, SA ;

JISRAWI, N ;

MINLEE, YH ;

MCLEAN, WL ;

CROFT, M .

APPLIED PHYSICS LETTERS, 1987, 51 (08) :619-621

[2] MAGNETOOPTICAL CHARACTERISTICS OF BISUBSTITUTED RARE-EARTH IRON-GARNET FILMS PREPARED BY LASER-ABLATION [J].

KIDOH, H ;

YASHIMA, H ;

MORIMOTO, A ;

SHIMIZU, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (7A) :4094-4099

[3]

OTUBO S, 1990, JPN J APPL PHYS, V29, pL133

[4]

Stolt L., 1995, P 13 EUR PHOT SOL EN, P1451

[5]

TUTTLE JR, 1993, P 23 IEEE PHOT SPEC, P107

[6] Preparation of CuInSe2 thin films with large grain by excimer laser ablation [J].

Yoshida, A ;

Tanahashi, N ;

Tanaka, T ;

Demizu, Y ;

Yamamoto, Y ;

Yamaguchi, T .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 1998, 50 (1-4) :7-12

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