Diagnostics and insights on PECVD for gas-barrier coatings

被引：39

作者：

Creatore, M ^{[1
]}

Palumbo, F ^{[1
]}

d'Agostino, R ^{[1
]}

机构：

[1] Univ Bari, Dipartimento Chim, CNR, Ctr Studi Chim Plasmi, I-70124 Bari, Italy

来源：

PURE AND APPLIED CHEMISTRY | 2002年 / 74卷 / 03期

关键词：

D O I：

10.1351/pac200274030407

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

In this work, we report on our last results concerning the polyethyleneterephtalate barrier performance optimization as a function of the chemistry of the SiOx coating, deposited by means of hexamethyldisiloxane/oxygen-fed plasmas ignited in an RF capacitively coupled parallel plates reactor. The influence of the gas feed composition and power on the plasma phase/coating chemistry and on the O-2 gas transmission rate has been investigated. The plasma phase has been studied by means of Fourier transform infrared absorption (FT-IR) and optical emission spectroscopies (OES), and the results have been coupled to the film chemistry investigated by means of FT-IR spectroscopy. These techniques show excellent potentialities in the correlation of the plasma phase and film chemistries with the barrier properties of the SiOx-coated polymer, especially when a very good barrier level is required.

引用

页码：407 / 411

页数：5

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