Dislocation plasticity in thin metal films

被引:61
作者
Kraft, O [1 ]
Freund, LB
Phillips, R
Arzt, E
机构
[1] Max Planck Inst Met Res, Stuttgart, Germany
[2] CALTECH, Pasadena, CA 91125 USA
[3] Univ Stuttgart, D-7000 Stuttgart, Germany
关键词
mechanical properties; metals; thin films;
D O I
10.1557/mrs2002.17
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This article describes the current level of understanding of dislocation plasticity in thin films and small structures in which the film or structure dimension plays an important role. Experimental observations of the deformation behavior of thin films, including mechanical testing as well as electron microscopy studies, will be discussed in light of theoretical models and dislocation simulations. In particular, the potential of applying strain-gradient plasticity theory to thin-film deformation is discussed. Although the results of all studies presented follow a "smaller is stronger" trend, a clear functional dependence has not yet been established.
引用
收藏
页码:30 / 37
页数:8
相关论文
共 60 条
[1]   Interface controlled plasticity in metals: dispersion hardening and thin film deformation [J].
Arzt, E ;
Dehm, G ;
Gumbsch, P ;
Kraft, O ;
Weiss, D .
PROGRESS IN MATERIALS SCIENCE, 2001, 46 (3-4) :283-307
[2]  
Ashby M.F., 1982, DEFORMATION MECH MAP
[3]   DEFORMATION OF PLASTICALLY NON-HOMOGENEOUS MATERIALS [J].
ASHBY, MF .
PHILOSOPHICAL MAGAZINE, 1970, 21 (170) :399-&
[4]  
BADER S, 1995, MATER RES SOC SYMP P, V356, P435
[5]   MECHANICAL STRENGTH AND MICROSTRUCTURE OF OXYGEN ION-IMPLANTED AL FILMS [J].
BADER, S ;
FLINN, PA ;
ARZT, E ;
NIX, WD .
JOURNAL OF MATERIALS RESEARCH, 1994, 9 (02) :318-327
[6]   Thermomechanical behavior of different texture components in Cu thin films [J].
Baker, SP ;
Kretschmann, A ;
Arzt, E .
ACTA MATERIALIA, 2001, 49 (12) :2145-2160
[7]   AN X-RAY-METHOD FOR DIRECT DETERMINATION OF THE STRAIN STATE AND STRAIN RELAXATION IN MICRON-SCALE PASSIVATED METALLIZATION LINES DURING THERMAL CYCLING [J].
BESSER, PR ;
BRENNAN, S ;
BRAVMAN, JC .
JOURNAL OF MATERIALS RESEARCH, 1994, 9 (01) :13-24
[8]  
BROTZEN FR, 1994, INT MATER REV, V39, P24, DOI 10.1179/095066094790150973
[9]   PLASTIC PROPERTIES OF POLYCRYSTALLINE THIN-FILMS ON A SUBSTRATE [J].
CHAUDHARI, P .
PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1979, 39 (04) :507-516
[10]   Observations of low cycle fatigue of Al thin films for MEMS applications [J].
Cornella, G ;
Vinci, RP ;
Iyer, RS ;
Dauskardt, RH ;
Bravman, JC .
MICROELECTROMECHANICAL STRUCTURES FOR MATERIALS RESEARCH, 1998, 518 :81-86