Chemical surface modification of fluorocarbon polymers by excimer laser processing

被引:27
作者
Niino, H [1 ]
Yabe, A [1 ]
机构
[1] NIMC,TSUKUBA,IBARAKI 305,JAPAN
关键词
D O I
10.1016/0169-4332(95)00529-3
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Surface of poly(tetrafluoroethylene) [PTFE] film was modified chemically by an ArF excimer laser-induced reaction in a hydrazine gas atmosphere. The polymer surface modified upon the irradiation of 1000 pulses at 27 mJ cm(-2), which was a fairly lower fluence than the ablation threshold for usual polymer films, showed hydrophilicity (contact angle for water: 30 degrees) enough to be metallized by chemical plating. The mechanism for chemical surface modification was investigated by FTIR, XPS, and SIMS analyses. The laser-treated PTFE film was metallized by a chemical plating process. These processes will be used to fabricate printed wiring boards for high frequency electronics.
引用
收藏
页码:550 / 557
页数:8
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