The surface chemical modification of poly(tetrafluoroethylene) and poly(tetrafluoroethylene-co-hexafluoropropylene) films was carried out in hydrazine gas photolyzed with ArF excimer laser irradiation. The contact angle of the modified surfaces with water changed from 130-degrees to 30-degrees due to the reaction with hydrazine. Nitrogen on the surface was detected with x-ray photoelectron spectroscopy, suggesting that amino groups were Fe introduced onto the surface. In addition, on the basis of hydrophilic behavior, we succeeded in selective-area electroless plating of nickel metal on the chemically modified surface.