Microswitches with sputtered Au, AuPd, Au-on-AuPt, and AuPtCu alloy electric contacts

被引：69

作者：

Coutu, Ronald A., Jr. ^{[1
]}

Reid, James R.

Cortez, Rebecca

Strawser, Richard E.

Kladitis, Paul E.

机构：

[1] USAF, Res Lab, AFRL Sensors Directorate, Aerosp Components Div, Wright Patterson AFB, OH 45433 USA

[2] USAF, Res Lab, Antenna Technol Branch, Bedford, MA 01731 USA

来源：

IEEE TRANSACTIONS ON COMPONENTS AND PACKAGING TECHNOLOGIES | 2006年 / 29卷 / 02期

关键词：

alloys; electric contacts; microelectromechanical systems (MEMS); microswitch;

D O I：

10.1109/TCAPT.2006.875898

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper is the first to report on a new analytic model for predicting microcontact resistance and the design, fabrication, and testing of microelectromechanical systems (MEMS) metal contact switches with sputtered bimetallic (i.e., gold (Au)-on-Au-platinum (Pt), (Au-on-Au-(6.3at%)Pt)); binary alloy (i.e., Au-palladium (Pd), (Au-(3.7at%)Pd)), and ternary alloy (i.e., Au-Pt-copper (Cu), (Au-(5.0at%)Pt-(0.5at%)Cu)) electric contacts. The microswitches with bimetallic and binary alloy contacts resulted in contact resistance values between 1-2 Omega. Preliminary reliability testing indicates a 3 x increase in switching lifetime when compared to microswitches with sputtered An electric contacts. The ternary alloy exhibited approximately a 6 x increase in switch lifetime with contact resistance values ranging from approximately 0.2-1.8 Omega.

引用

页码：341 / 349

页数：9

共 28 条

[1] Quantum properties of atomic-sized conductors [J].

Agraït, N ;

Yeyati, AL ;

van Ruitenbeek, JM .

PHYSICS REPORTS-REVIEW SECTION OF PHYSICS LETTERS, 2003, 377 (2-3) :81-279

[2] Performance of microcontacts tested with a novel MEMS device [J].

Bromley, SC ;

Nelson, BJ .

PROCEEDINGS OF THE FORTY-SEVENTH IEEE HOLM CONFERENCE ON ELECTRICAL CONTACTS, 2001, :122-127

[3]

Calladine C., 1985, Plasticity for engineers

[4] AN ELASTIC-PLASTIC MODEL FOR THE CONTACT OF ROUGH SURFACES [J].

CHANG, WR ;

ETSION, I ;

BOGY, DB .

JOURNAL OF TRIBOLOGY-TRANSACTIONS OF THE ASME, 1987, 109 (02) :257-263

[5] An elastic-plastic contact model for a rough surface with an ion-plated soft metallic coating [J].

Chang, WR .

WEAR, 1997, 212 (02) :229-237

[6] MEMS microswitches for reconfigurable microwave circuitry [J].

Duffy, S ;

Bozler, C ;

Rabe, S ;

Knecht, J ;

Travis, L ;

Wyatt, P ;

Keast, C ;

Gouker, M .

IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS, 2001, 11 (03) :106-108

[7]

Firestone F., 1933, MECH ENG, V55, P569, DOI DOI 10.4236/WJM.2013.32007

[8]

Greenwood J. A., 1970, Proceedings of the Institution of Mechanical Engineers, V185, P625

[9]

GREENWOOD JA, 1966, P ROY SOC LOND A MAT, V295, P257

[10]

Holm R., 1969, ELECT CONTACTS THEOR

← 1 2 3 →