Rutherford backscattering from layered structures beyond the single scattering model

被引：63

作者：

Eckstein, W ^{[1
]}

Mayer, M ^{[1
]}

机构：

[1] Max Planck Inst Plasmaphys, D-85748 Garching, Germany

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1999年 / 153卷 / 1-4期

关键词：

D O I：

10.1016/S0168-583X(98)01011-8

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Rutherford backscattering spectra have been calculated with a parallel Version of TRIM.SP for 0.5 and 1 MeV He-4 normally on a target consisting of about 100 nm Au on Si. The calculated energy distributions are compared with experimental distributions and with those calculated with SIMNRA including double scattering. The contributions of plural scattering on the distributions are determined. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：337 / 344

页数：8

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