Preparation of Pb(Zr0.52Ti0.48)O-3 thin films on Pt/RuO2 double electrode by a new sol-gel route

被引：22

作者：

Kim, SH ^{[1
]}

Choi, YS ^{[1
]}

Kim, CE ^{[1
]}

Oh, YJ ^{[1
]}

机构：

[1] KOREA INST SCI & TECHNOL,DIV CERAM,SEOUL 130650,SOUTH KOREA

来源：

JOURNAL OF MATERIALS RESEARCH | 1997年 / 12卷 / 06期

关键词：

D O I：

10.1557/JMR.1997.0216

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Pb(Zr0.52Ti0.48)O-3 (PZT) thin film on Pt/RuO2 double electrode was successfully prepared by using a new alkoxide-alkanolamine, sol-gel method. It was observed that the use of Pt/RuO2 double electrode reduced leakage current, resulting in a marked improvement in the leakage characteristics and more reliable capacitors. Typical P-E hysteresis behavior was observed even at low applied voltage of 5 V, manifesting greatly improved remanence and coercivity, Fatigue and breakdown characteristics, measured at 5 V, showed stable behavior, and no degradation in polarization was observed up to 10(11) cycles.

引用

页码：1576 / 1581

页数：6

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