Multiscale analysis of the laser-induced damage threshold in optical coatings

被引：38

作者：

Capoulade, Jeremie ^{[1
]}

Gallais, Laurent ^{[1
]}

Natoli, Jean-Yves ^{[1
]}

Commandre, Mireille ^{[1
]}

机构：

[1] Univ Aix Marseille, CNRS, UMR 6133, Inst Fresnel,Ecole Cent Marseille, F-13397 Marseille 20, France

来源：

APPLIED OPTICS | 2008年 / 47卷 / 29期

关键词：

D O I：

10.1364/AO.47.005272

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We have investigated the influence of laser beam size on laser-induced damage threshold (LIDT) in the case of single- and multiple-shot irradiation. The study was performed on hafnia thin films deposited with various technologies (evaporation, sputtering, with or without ion assistance). LIDT measurements were carried out at 1064 nm and 12 as with a spot size ranging from a few tens to a few hundreds of micrometers, in 1-on-1 and R-on-l. modes. These measurements were compared with simulations obtained with the statistical theory of laser-induced damage caused by initiating inclusions. We show, how to obtain information on the initiating defect properties and the related physical damage mechanisms with a multiscale study. Under certain conditions it is possible with this method to discriminate different defects, estimate their densities. and follow the evolution of the defects under multiple irradiation. The different metrology implications of our approach, particularly for obtaining a functional LIDT of optical components are discussed. (C) 2008 Optical Society of America

引用

页码：5272 / 5280

页数：9

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