Laser conditioning of LaF3/MgF2 dielectric coatings at 248 nm

被引：57

作者：

Eva, E

Mann, K

Kaiser, N

Anton, B

Henking, R

Ristau, D

Weissbrodt, P

Mademann, D

Raupach, L

Hacker, E

机构：

[1] FRAUNHOFER INST,ANGEW OPTIK & FEINMECH JENA,D-07745 JENA,GERMANY

[2] LASER ZENTRUM HANNOVER EV,D-30419 HANNOVER,GERMANY

[3] OPTIK SYST GMBH,JENOPTIK LASER,D-07739 JENA,GERMANY

来源：

APPLIED OPTICS | 1996年 / 35卷 / 28期

关键词：

conditioning; fluoride coatings; excimer lasers; laser damage; absorption;

D O I：

10.1364/AO.35.005613

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Highly reflective LaF3/MgF2 systems for a wavelength of 248 nm on MgF2 and crystalline quartz substrates were investigated. The influence of laser conditioning on damage threshold and absorptance was remarkable in those coatings that had a high initial absorptance. Monitoring with a laser calorimeter revealed the conditioning effect to be a function of the irradiation dose rather than of energy density or pulse rate. Furthermore, x-ray photoelectron spectroscopy and transmission electron microscopy showed that conditioning induces stoichiometric and structural changes in the multilayers, especially in near-surface sublayers, whereas scanning electron microscopy and atomic force microscopy investigations indicated that the surface remains unchanged. (C) 1996 Optical Society of America

引用

页码：5613 / 5619

页数：7

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