A numerical method to simulate radio-frequency plasma discharges

被引：65

作者：

Hammond, EP ^{[1
]}

Mahesh, K

Moin, P

机构：

[1] Stanford Univ, Dept Mech Engn, Stanford, CA 94305 USA

[2] Univ Minnesota, Dept Aerosp Engn & Mech, Minneapolis, MN 55455 USA

来源：

JOURNAL OF COMPUTATIONAL PHYSICS | 2002年 / 176卷 / 02期

关键词：

plasma; numerical method; conservative; nondissipative;

D O I：

10.1006/jcph.2001.6994

中图分类号：

TP39 [计算机的应用];

学科分类号：

081203 ; 0835 ;

摘要：

A fully conservative and efficient numerical algorithm is developed for fluid simulations of radio-frequency plasma discharges. Results are presented in one and multiple dimensions for a helium discharge. The algorithm produces accurate results even on fairly coarse grids A without the use of numerical dissipation. The proposed electron flux discretization is more accurate and efficient than two of the most commonly used discretizations: lock-order upwinding (M. S. Barnes. T. J. Colter, and M. E. Elta. 1987. J. Appl. Phys. 61, 81) and Scharfetter-Gummel (D. L. Scharfetter and H. K. Gummel. 1969, IEEE Trans. Electron Devices ED-16, 64). (C) 2002 Elsevier Science (USA).

引用

页码：402 / 429

页数：28

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