Novel CCD-based pH imaging sensor

被引：58

作者：

Sawada, K ^{[1
]}

Mimura, S

Tomita, K

Nakanishi, T

Tanabe, H

Ishida, M

Ando, T

机构：

[1] Toyohashi Univ Technol, Dept Elect & Elect Engn, Aichi 4418580, Japan

[2] Horiba Ltd, Kyoto 601, Japan

[3] Shizuoka Univ, Elect Res Inst, Hamamatsu, Shizuoka 432, Japan

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1999年 / 46卷 / 09期

关键词：

CCD; image sensor; pH sensor;

D O I：

10.1109/16.784183

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We propose and demonstrate a novel pH imaging sensor based on the Charge Coupled Device (CCD) technology, This device consists of pH sensing parts, which sense pH value and transform a DH value to electric charges, and conventional CCD parts, which transfer the electric charges to read out circuit, A thin Si3N4 film which acts as the hydrogen ion-sensitive membrane was used in the pH sensing him, The prototype devices were fabricated and was confirmed the device operation using pH equivalent voltages, It was found that the output signal from the imaging sensor was lineally changed from pH 0 to 14 and successfully observed a pH image on a black and white TV monitor.

引用

页码：1846 / 1849

页数：4