Organic functionalization of group IV semiconductor surfaces: principles, examples, applications, and prospects

被引:507
作者
Bent, SF [1 ]
机构
[1] Stanford Univ, Dept Chem Engn, Stanford, CA 94305 USA
基金
美国国家科学基金会;
关键词
single crystal surfaces; silicon; germanium; diamond; chemisorption; alkenes; infrared absorption spectroscopy; scanning tunneling microscopy;
D O I
10.1016/S0039-6028(01)01553-9
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Organic functionalization is emerging as an important area in the development of new semiconductor-based materials and devices. Direct, covalent attachment of organic layers to a semiconductor interface provides for the incorporation of many new properties, including lubrication, optical response, chemical sensing, or biocompatibility. Methods by which to incorporate organic functionality to the surfaces of semiconductors have seen immense progress in recent years, and in this article several of these approaches are reviewed. Examples are included from both dry and wet processing environments. The focus of the article is on attachment strategies that demonstrate the molecular nature of the semiconductor surface. In many cases, the surfaces mimic the reactivity of their molecular carbon or organosilane counterparts, and examples of functionalization reactions are described in which direct analogies to textbook organic and inorganic chemistry can be applied. This article addresses the expected impact of these functionalization strategies on emerging technologies in nanotechnology, sensing, and bioengineering. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:879 / 903
页数:25
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