A field emitter array with an amorphous silicon thin-film transistor on glass

被引:4
作者
Gamo, H
Kanemaru, S
Itoh, J
机构
[1] Toppan Printing Co Ltd, Elect Res Lab, Sugito, Saitama 3458508, Japan
[2] Electrotech Lab, Tsukuba, Ibaraki 3058568, Japan
关键词
D O I
10.1063/1.122154
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have designed and fabricated a field emitter array (FEA) with an amorphous silicon thin-film transistor (a-Si TFT) monolithically, as an emission control device, bn a glass substrate. The TFT was fabricated on the glass substrate at a low temperature, less than 350 degrees C. The measured emission characteristics showed that the FEA had saturated emission currents with the aid of the a-Si TFT; thus the a-Si TFT is expected to stabilize the emission current. The emission current of the FEA was controlled in the range of 0-0.12 mu A With the TFT-gate voltage from 0 to 15 V. (C) 1998 American Institute of Physics. [S0003-6951(98)02435-8].
引用
收藏
页码:1301 / 1303
页数:3
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