Liquid phase deposition film of tin oxide

被引:85
作者
Tsukuma, K [1 ]
Akiyama, T [1 ]
Imai, H [1 ]
机构
[1] KEIO UNIV,FAC SCI & TECHNOL,DEPT APPL CHEM,YOKOHAMA,KANAGAWA 223,JAPAN
关键词
D O I
10.1016/S0022-3093(96)00583-2
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The thin film of tin oxide was formed in the solution containing 0.005-0.3 mol/l SnF2. The procedure of film formation was very simple; the solution, in which a substrate is immersed, is maintained above 40 degrees C for tens of hours. In this method, the hydrolysis product of SnF2 deposited as the film on a substrate. As-deposition film included 6-16 mol% fluorine. The chemical component was deduced as SnO2-05xFx, where 0.17 <x <0.5. The film was modified to pure SnO, by heating above 300 degrees C. The electrical conductivity was improved to 1.4 x 10(-2) Omega cm by heating at 500 degrees C. The model of liquid phase deposition was proposed to extend another oxide film.
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页码:48 / 54
页数:7
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