PREPARATION AND PROPERTIES OF REACTIVELY CO-SPUTTERED TRANSPARENT CONDUCTING FILMS

被引：82

作者：

LEHMANN, HW ^{[1
]}

WIDMER, R ^{[1
]}

机构：

[1] LABS RCA LTD,ZURICH,SWITZERLAND

来源：

THIN SOLID FILMS | 1975年 / 27卷 / 02期

关键词：

D O I：

10.1016/0040-6090(75)90041-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：359 / 368

页数：10

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