Design of MEMS and microsystems

被引：3

作者：

Nagel, DJ ^{[1
]}

机构：

[1] George Washington Univ, Dept Elect Engn & Comp Sci, Washington, DC 20052 USA

来源：

DESIGN, TEST, AND MICROFABRICATION OF MEMS AND MOEMS, PTS 1 AND 2 | 1999年 / 3680卷

关键词：

MEMS; microsystems; computer-aided design; CAD; electronic design automation; EDA;

D O I：

10.1117/12.341196

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Facile, integrated and comprehensive software is needed for the design of processes, models and simulations, which are required for effective production of MEMS and microsystems. The characteristics of computer-aided design software now available from seven companies are reviewed. Three of the firms have roots in microelectronics, and three were formed specifically for MEMS design. Electronic, mechanical, thermal and fluidic mechanisms are commonly included. One company is especially strong in microfluidics. Two of the design suites permit computational coupling between a MEMS device and its package. High spatial- and temporal-resolution optical diagnostics are now producing detailed data that will challenge design and simulation software for MEMS and microsystems. Near and far term prospects for the CAD of MEMS and microsystems are projected.

引用

页码：20 / 29

页数：10

共 11 条

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