Optical MEMS devices based on moving waveguides

被引：72

作者：

Ollier, E ^{[1
]}

机构：

[1] CEA, LETI Silicon Technol Dept, F-38054 Grenoble 9, France

来源：

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS | 2002年 / 8卷 / 01期

关键词：

light deflectors; microelectromechnical devices; optical planar waveguides; optical fiber communication; optical switches; vibration control;

D O I：

10.1109/2944.991411

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The paper deals with optical microelectromechanical systems (MEMS), and in particular with optical MEMS based on moving waveguides. After a short overview of this very attractive novel activity, specific technological problems and solutions are discussed. Then the following examples of recent developments based on silica on silicon technology are presented: optical switch, vibration sensor, and optical scanner.

引用

页码：155 / 162

页数：8

共 23 条

[1]

FAURE JP, OFC 2001, P19

[2]

FOUQUET JE, OFC 2000

[3]

HARONIAN D, 2000, P SPIE, V4075

[4]

Hoffmann M., 1995, ECIO '95 Proceedings. 7th European Conference on Integrated Optics with Technical Exhibition. Regular and Invited Papers, P403

[5]

HORINO M, 1998, JSME INT J C, V41

[6]

HORNBECK LJ, 1996, OPTICAL MEMS THEIR A

[7]

JIN YH, 2000, OPT MEMS C KAUAI HI, P22

[8] Silicon-on-insulator (SOI) movable integrated optical waveguide technology [J].

Kan, SC ;

Eng, TTH ;

Sin, SSY ;

Wong, GKL .

SENSORS AND ACTUATORS A-PHYSICAL, 1996, 54 (1-3) :679-683

[9]

KOPKA P, 1999, MOEMS 99

[10]

LIN LY, 2000, OFC 2000

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