Silicon-on-insulator (SOI) movable integrated optical waveguide technology

被引：6

作者：

Kan, SC

Eng, TTH

Sin, SSY

Wong, GKL

机构：

[1] Department of Physics, Hong Kong Univ. of Sci. and Technol., Hong Kong, Clear Water Bay

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1996年 / 54卷 / 1-3期

关键词：

optical waveguides; silicon-on-insulator;

D O I：

10.1016/S0924-4247(97)80037-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The technology of a new type of optical waveguide, the silicon-on-insulator (SOI) movable integrated optical waveguide, is discussed. The fabrication method based on the surface-micromachining technique and wafer bonding is described. Applications in optical switching and optical scanning probing at the communication wavelength of 1300 nm are demonstrated.

引用

收藏

页码：679 / 683

页数：5

相关论文

共 16 条

[1] INTEGRATED OPTICAL RING-RESONATOR WITH MICROMECHANICAL DIAPHRAGM FOR PRESSURE SENSING [J].

DEBRABANDER, GN ;

BOYD, JT ;

BEHEIM, G .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1994, 6 (05) :671-673

[2]

ENG TTH, 1995, IEEE TENCON95 MICROE

[3]

ENG TTH, IN PRESS SENSORS ACT

[4]

ENG TTH, 1995, 8 INT C SOL STAT SEN

[5] ELASTOOPTICAL PROPERTIES OF SION LAYERS IN AN INTEGRATED OPTICAL INTERFEROMETER USED AS A PRESSURE SENSOR [J].

FISCHER, K ;

MULLER, J ;

HOFFMANN, R ;

WASSE, F ;

SALLE, D .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 1994, 12 (01) :163-169

[6] MONOLITHIC INTEGRATION OF A RESONANT TUNNELING DIODE AND A QUANTUM-WELL SEMICONDUCTOR-LASER [J].

GRAVE, I ;

KAN, SC ;

GRIFFEL, G ;

WU, SW ;

SAAR, A ;

YARIV, A .

APPLIED PHYSICS LETTERS, 1991, 58 (02) :110-112

[7] SILICON ON INSULATOR MATERIAL BY WAFER BONDING [J].

HARENDT, C ;

HUNT, CE ;

APPEL, W ;

GRAF, HG ;

HOFFLINGER, B ;

PENTEKER, E .

JOURNAL OF ELECTRONIC MATERIALS, 1991, 20 (03) :267-277

[8] GLASS WAVE-GUIDES ON SILICON FOR HYBRID OPTICAL PACKAGING [J].

HENRY, CH ;

BLONDER, GE ;

KAZARINOV, RF .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 1989, 7 (10) :1530-1539

[9] GAAS/ALAS DOUBLE-BARRIER RESONANT TUNNELING STRUCTURE ON SI WITH LARGE PEAK TO VALLEY RATIO AT ROOM-TEMPERATURE [J].

KAN, SC ;

MORKOC, H ;

YARIV, A .

APPLIED PHYSICS LETTERS, 1988, 52 (26) :2250-2251

[10] LOW-LOSS SINGLEMODE OPTICAL WAVE-GUIDES WITH LARGE CROSS-SECTION IN SILICON-ON-INSULATOR [J].

SCHMIDTCHEN, J ;

SPLETT, A ;

SCHUPPERT, B ;

PETERMANN, K ;

BURBACH, G .

ELECTRONICS LETTERS, 1991, 27 (16) :1486-1488