Structured films of light-emitting silicon nanoparticles produced by cluster beam deposition

被引:52
作者
Huisken, F
Kohn, B
Paillard, V
机构
[1] Max Planck Inst Stromungsforsch, D-37073 Gottingen, Germany
[2] Univ Toulouse 3, Phys Solides Lab, F-31062 Toulouse 4, France
关键词
D O I
10.1063/1.124176
中图分类号
O59 [应用物理学];
学科分类号
摘要
Crystalline silicon nanoparticles (quantum dots) with diameters around 4 nm are produced via CO2-laser-induced decomposition of SiH4 in a flow reactor and subsequently transferred into a freely propagating cluster beam. Thin structured films are then obtained by shaping the beam with a mask and depositing the nanoclusters at low energy on a sapphire substrate. Upon illumination with ultraviolet radiation, the nanoparticles exhibit strong photoluminescence in the red. (C) 1999 American Institute of Physics. [S0003-6951(99)00925-0].
引用
收藏
页码:3776 / 3778
页数:3
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