Novel integrating solid state detector with segmentation for scanning transmission soft x-ray microscopy

被引：6

作者：

Feser, M ^{[1
]}

Jacobsen, C ^{[1
]}

Rehak, P ^{[1
]}

DeGeronimo, G ^{[1
]}

Holl, P ^{[1
]}

Strüder, L ^{[1
]}

机构：

[1] SUNY Stony Brook, Dept Phys & Astron, Stony Brook, NY 11749 USA

来源：

X-RAY MICRO- AND NANO-FOCUSING: APPLICATIONS AND TECHNIQUES II | 2001年 / 4499卷

关键词：

x-ray microscopy; soft x-ray detectors;

D O I：

10.1117/12.450229

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

An integrating solid state detector with segmentation has been developed that addresses the needs in scanning transmission x-ray microscopy below 1 keV photon energy. The detector is not cooled and can be operated without an entrance window which leads to a total photon detection efficiency close to 100%. The chosen segmentation with 8 independent segments is matched to the geometry of the STXM to maximize image mode flexibility. In the bright field configuration for I ms integration time and 520 eV x-rays the rms noise is 8 photons per integration.

引用

页码：117 / 125

页数：9

共 16 条

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