Transmission electron microscope study of heteroepitaxial diamond on Pt (111)

Microstructures of heteroepitaxial diamond films grown on Pt (111) were examined by transmission electron microscopy (TEM). Our results show that the film consists of highly (111)-oriented diamond particles including subgrains with azimuthal rotation within similar to-10 degrees. The internal defects such as stacking faults, microtwins and dislocations are unevenly distributed within a grain. Electron diffraction patterns taken in both plan-view and cross-sectional view show that the epitaxial relationship at some local interface areas between the diamond and Pt is indeed diamond (111)/Pt (111) and diamond [1 (1) over bar 10]/Pt [1 (1) over bar 0]. However, the interface is very rough, as nide as similar to 700 nm in depth, including a graphite layer of similar to 300 nm thick and small Pt fragments. Based on the observed structures, the origins of the defects, epitaxial alignment of the diamond crystals, and nucleation site are discussed. (C) 1997 Elsevier Science S.A.