Effects of capacitors, resistors and residual charge on the static and dynamic performance of electrostatically-actuated devices

被引：14

作者：

Chan, EK ^{[1
]}

Dutton, RW ^{[1
]}

机构：

[1] Stanford Univ, Ctr Integrated Syst, Stanford, CA 94305 USA

来源：

DESIGN, TEST, AND MICROFABRICATION OF MEMS AND MOEMS, PTS 1 AND 2 | 1999年 / 3680卷

关键词：

electromechanical; full-gap travel; stable; folded capacitor; floating electrode; shielded tether;

D O I：

10.1117/12.341276

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The important practical and realistic design issues of an electrostatic actuator/positioner with full-gap travel are discussed. Analytic expressions and numerical simulations show that parasitic capacitances, and non-uniform deformation in two and three dimensions influence the range of travel of an erectrostatic positioner stabilized by the addition of a series capacitor. The effects of residual charge on electrostatically-actuated devices are described, The dynamic stepping characteristics of the positioner under compressible squeeze-film damping and resistive damping are compared. The physical descriptions of devices being fabricated in the MUMPs process are presented along with 3D simulation results that demonstrate viability.

引用

页码：120 / 130

页数：11