Monolithic integration technique for microlens arrays with infrared focal plane arrays

被引：26

作者：

Chen, SH ^{[1
]}

Yi, XJ

Kong, LB

He, M

Wang, HC

机构：

[1] Huazhong Univ Sci & Technol, Dept Optoelect Engn, Wuhan 430074, Peoples R China

[2] Huazhong Univ Sci & Technol, Natl Key Lab Laser Technol, Wuhan 430074, Peoples R China

来源：

INFRARED PHYSICS & TECHNOLOGY | 2002年 / 43卷 / 02期

基金：

中国国家自然科学基金;

关键词：

monolithic integration; infrared focal plane arrays; PtSi; diffractive microlens arrays; ion-beam milling; binary optics;

D O I：

10.1016/S1350-4495(01)00133-5

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Based on scalar diffraction theory, 8-phase-level 256 x 290 element diffractive microlens arrays with lenslet dimension of 50 x 33 mum(2) have been fabricated on the back side of PtSi infrared focal plane arrays. The design and fabrication process are discussed, The measurement results indicate that the imaging quality has been greatly improved and the ratio of the signal-to-noise of the infrared focal plane array integration with microlens array is increased by a factor of 2.5. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：109 / 112

页数：4

共 6 条

[1] Research on hybrid device of Si microlens arrays with long focus and IR detector arrays [J].

Chen, SH ;

Yi, XJ ;

He, M ;

Zhang, XY .

2000 25TH INTERNATIONAL CONFERENCE ON INFRARED AND MILLIMETER WAVES CONFERENCE DIGEST, 2000, :147-148

[2] Design of diffractive microlens arrays integration with focal plane arrays [J].

Chen, SH ;

Yi, XJ ;

Li, Y ;

He, M ;

Chen, SX ;

Kong, LB .

BIOMEDICAL PHOTONICS AND OPTOELECTRONIC IMAGING, 2000, 4224 :170-173

[3] Hybrid integration between long focus microlens array and IR detector array [J].

Chen, SH ;

Yi, XJ ;

Li, Y ;

He, M ;

Kong, LB ;

Ma, H .

INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES, 2001, 22 (03) :393-398

[4]

Chen Sihai, 2001, Acta Photonica Sinica, V30, P608

[5] Micro-optic integration with focal plane arrays [J].

Motamedi, ME ;

Tennant, WE ;

Sankur, HO ;

Melendes, R ;

Gluck, NS ;

Park, S ;

Arias, JM ;

Bajaj, J ;

Pasko, JG ;

McLevige, WV ;

Zandian, M ;

Hall, RL ;

Richardson, PD .

OPTICAL ENGINEERING, 1997, 36 (05) :1374-1381

[6] MONOLITHIC INTEGRATION OF VERTICAL-CAVITY LASER-DIODES WITH REFRACTIVE GAAS MICROLENSES [J].

STRZELECKA, EM ;

ROBINSON, GD ;

PETERS, MG ;

PETERS, FH ;

COLDREN, LA .

ELECTRONICS LETTERS, 1995, 31 (09) :724-725

← 1 →