Hybrid integration between long focus microlens array and IR detector array

被引：13

作者：

Chen, SH ^{[1
]}

Yi, XJ ^{[1
]}

Li, Y ^{[1
]}

He, M ^{[1
]}

Kong, LB ^{[1
]}

Ma, H ^{[1
]}

机构：

[1] Huazhong Univ Sci & Technol, Dept Optoelect Engn, Wuhan 430074, Peoples R China

来源：

INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES | 2001年 / 22卷 / 03期

关键词：

microlens array; step simulation; ion beam etching; hybrid integration; focal plane array (FPA);

D O I：

10.1023/A:1010737521182

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A special method, named step simulation method, is proposed for fabricating Si microlens array to improve the performance of infrared focal plane array (IR FPA). The focus length of rectangle-based multistep microlens array with element dimension of 40 mum X 30 mum is 885.4 mum by the method, which is much longer than the focus length of microlens array fabricated by conventional Fresnel binary optics technique., The large-scale 256 X 256 element microlens array is hybrid-integrated with the PtSi Schottky-barrier IR FPA by optical adhesive. The test results show that diffractive spot size of the microlens is 17 mum X 15 mum and the average optical response of the IR FPA is increased by a factor of 2.4.

引用

页码：393 / 398

页数：6

共 10 条

[1]

DAMATO D, 1991, P SOC PHOTO-OPT INS, V1544, P166, DOI 10.1117/12.49384

[2] Diffractive micirolens array monolithic integration with PtSi focal plane array [J].

Li, Y ;

Yi, XJ ;

Cai, LP .

INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES, 2000, 21 (09) :1417-1425

[3] Diffractive microlens array monolithic integration with PtSi focal plane array [J].

Li, Y ;

Yi, XJ ;

Cai, LP ;

Chen, SH ;

Chen, SX .

2000 25TH INTERNATIONAL CONFERENCE ON INFRARED AND MILLIMETER WAVES CONFERENCE DIGEST, 2000, :141-142

[4] Micro-optic integration with focal plane arrays [J].

Motamedi, ME ;

Tennant, WE ;

Sankur, HO ;

Melendes, R ;

Gluck, NS ;

Park, S ;

Arias, JM ;

Bajaj, J ;

Pasko, JG ;

McLevige, WV ;

Zandian, M ;

Hall, RL ;

Richardson, PD .

OPTICAL ENGINEERING, 1997, 36 (05) :1374-1381

[5]

POPOVIC ZD, 1998, APPL OPTICS, V7, P1281

[6]

SIHAI C, 2000, 25 INT C INFR MILL W, P147

[7]

SIHAI C, 2000, P SOC PHOTO-OPT INS, V224, P170

[8] Multilevel diffractive microlens fabrication by one-step laser-assisted chemical etching upon high-energy-beam sensitive glass [J].

Wang, MR ;

Su, H .

OPTICS LETTERS, 1998, 23 (11) :876-878

[9] Microlens arrays formed by melting photoresist and ion beam milling [J].

Yi, XJ ;

Zhang, XY ;

Li, Y ;

Zhao, XR .

MINIATURIZED SYSTEMS WITH MICRO-OPTICS AND MICROMECHANICS III, 1998, 3276 :249-253

[10] 128-x128-element silicon microlens array fabricated by ion beam etching for PtSi IRCCD [J].

Zhang, XY ;

Yi, XJ ;

He, M ;

Zhao, XG .

INTEGRATED OPTOELECTRONICS II, 1998, 3551 :191-198

← 1 →