Preparation and characterization of MgF2 thin film by a trifluoroacetic acid method

被引:73
作者
Fujihara, S
Tada, M
Kimura, T
机构
[1] Department of Applied Chemistry, Faculty of Science and Technology, Keio University, Yokohama 223, 3-14-1, Hiyoshi, Kohoku-ku
关键词
MgF2; thin film; trifluoroacetic acid; transmittance; microstructure;
D O I
10.1016/S0040-6090(97)00156-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The preparation of magnesium fluoride (MgF2) thin films on silica glass substrates was studied by a trifluoroacetic acid (TFA) method using trifluoroacetic acid as a fluorine source. The coating solution was prepared by stirring a mixture of magnesium ethoxide, isopropanol and TFA. MgF2 thin films were obtained by heat-treatment of the slain-coated films below 500 degrees C in air. Higher optical transmittance of the films was observed as compared to the substrates. Field emission scanning electron microscope (FE-SEM) observation revealed a particle size of less than 50 nm in the films. The formation process of MgF2 from trifluoroacetate gels was discussed according to the results of the thermal analysis of the gel. (C) 1997 Elsevier Science S.A.
引用
收藏
页码:252 / 255
页数:4
相关论文
共 7 条
[1]   MAGNETIC-PROPERTIES OF IRON FINE PARTICLES IN FE-MGF2 COMPOSITE FILMS [J].
FURUBAYASHI, T .
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1995, 140 :393-394
[2]   OPTICAL THIN-LAYERS OF MGF2 PRODUCED BY DECOMPOSITION OF ORGANIC MAGNESIUM-FLUORO COMPOUNDS [J].
JOOSTEN, PH ;
HELLER, P ;
NABBEN, HJP ;
VANHAL, HAM ;
POPMA, TJA ;
HAISMA, J .
APPLIED OPTICS, 1985, 24 (16) :2674-2678
[3]   CHARACTERIZATION OF OPTICAL THIN-FILMS [J].
PULKER, HK .
APPLIED OPTICS, 1979, 18 (12) :1969-1977
[4]   PREPARATION AND PROPERTIES OF GE MICROCRYSTALS IN MGF2 LAYERS [J].
THIELSCH, R ;
BOTTCHER, H .
CHEMICAL PHYSICS LETTERS, 1992, 189 (03) :226-230
[5]   POROUS FLUORIDE ANTIREFLECTIVE COATINGS [J].
THOMAS, IM .
APPLIED OPTICS, 1988, 27 (16) :3356-3358
[6]   ORGANIC ELECTROLUMINESCENT DEVICES FABRICATED USING A DIAMINE DOPED MGF2 THIN-FILM AS A HOLE-TRANSPORTING LAYER [J].
TOKITO, S ;
TAGA, Y .
APPLIED PHYSICS LETTERS, 1995, 66 (06) :673-675
[7]   COMPOSITION AND MORPHOLOGY OF A MGF2/AL MULTILAYER THIN-FILM REFLECTIVE COATING [J].
WEIMER, JJ ;
KIM, J ;
ZUKIC, M ;
TORR, DG .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (03) :1008-1012