Hydrogen-related degradation and recovery phenomena in Pb(Zr,Ti)O-3 capacitors with a platinum electrode

被引：46

作者：

Miki, H

KushidaAbdelghafar, K

Torii, K

Fujisaki, Y

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1997年 / 36卷 / 3A期

关键词：

memory; capacitor; ferroelectricity; Pb(Zr; Ti)O-3; electrode; Pt;

D O I：

10.1143/JJAP.36.1132

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Pb(Zr,Ti)O-3 capacitors with top platinum electrodes area subjected to hydrogen annealing from 300 degrees C to 450 degrees C. Both the remnant polarization and breakdown voltage were drastically degraded after hydrogen annealing, whereas the dielectric constant was found to be relatively stable. Capacitors recovered their characteristics before annealing after re-oxidation treatment. An interfacial degradation model with a platinum-catalysis reduction is proposed to explain these notable degradation phenomena.

引用

页码：1132 / 1135

页数：4

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