Optical characterization of two-dimensional photonic crystals based on spectroscopic ellipsometry with rigorous coupled-wave analysis

被引：32

作者：

Lin, CH

Chen, HL

Chao, WC

Hsieh, CI

Chang, WH

机构：

[1] Natl Nano Device Labs, Hsinchu 300, Taiwan

[2] Natl Taiwan Univ, Dept Mat Sci & Engn, Taipei 106, Taiwan

[3] Chung Shan Med Univ, Sch Appl Chem, Taichung 402, Taiwan

来源：

MICROELECTRONIC ENGINEERING | 2006年 / 83卷 / 4-9期

关键词：

photonic crystal; rigorous coupled-wave analysis; ellipsometry;

D O I：

10.1016/j.mee.2006.01.135

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A simple and non-destructive optical characterizing method for the 2D photonic crystal (PC) slab was carried out by using specular spectroscopic ellipsometry. The rigorous coupled-wave analysis (RCWA) was further applied to analyze the measured ellipsometric parameters and then to simulate the structure of the measured photonic crystal. A 2D square lattice of silicon rods fabricated by electron-beam lithography on the silicon substrate was used as a testing sample in this study. The reflectance spectrum of the characterized 2D PC was also simulated by RCWA to reflect its photonic bandgap behavior directly. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：1798 / 1804

页数：7

共 8 条

[1] Photonic-bandgap microcavities in optical waveguides [J].