Using direct nanoimprinting of ferroelectric films to prepare devices exhibiting bi-directionally tunable surface plasmon resonances

被引:32
作者
Chen, H. L. [1 ]
Hsieh, K. C. [1 ]
Lin, C. H. [2 ]
Chen, S. H. [3 ]
机构
[1] Natl Taiwan Univ, Dept Mat Sci & Engn, Taipei 10617, Taiwan
[2] Natl Cheng Kung Univ, Inst Electroopt Sci & Engn, Tainan 70101, Taiwan
[3] Natl Nano Device Lab, Hsinchu 30078, Taiwan
关键词
D O I
10.1088/0957-4484/19/43/435304
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In this paper, we describe an imprint method for the fabrication of bi-directionally tunable surface plasmon resonance (SPR) filters. A periodic metal/ferroelectric film stack exhibiting SPR phenomena was directly imprinted using a sharp mold without the need for a polymer-based resist. Both the refractive index of the surrounding lead zirconate titanate (PZT) films and the period of the textured PZT/metal/PZT structure were dependent upon both the absolute value and sign of the applied potential. The SPR wavelength of the PZT/gold/PZT-based tunable filter varied over a range of greater than 100 nm when applying potentials ranging from 0 to -15 V. This imprinting method has great potential for use in the fabrication of tunable optical filters without the need for complicated processes or specific materials.
引用
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页数:6
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