共 64 条
[2]
Chemical-mechanical planarization of Cu and Ta
[J].
JOM-JOURNAL OF THE MINERALS METALS & MATERIALS SOCIETY,
2001, 53 (06)
:50-52
[9]
METALLO-ORGANIC COMPOUNDS CONTAINING METAL-NITROGEN BONDS .3. DIALKYLAMINO COMPOUNDS OF TANTALUM
[J].
CANADIAN JOURNAL OF CHEMISTRY-REVUE CANADIENNE DE CHIMIE,
1962, 40 (07)
:1355-&
[10]
*BRUK AXS INC, SMART SAINT SADABS C