Ohmic contact to p-ZnSe and p-ZnMgSSe

被引:9
作者
Chang, SJ
Chen, WR
Su, YK
Tu, RC
Lan, WH
Chang, H
机构
[1] Natl Cheng Kung Univ, Dept Elect Engn, Tainan 70101, Taiwan
[2] Chung Shan Inst Sci & Technol, Lungtan 32500, Taiwan
关键词
D O I
10.1049/el:19990835
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The authors have deposited Ge/Cu onto p-ZnSe epitaxial layers, and found that the specific contact resistance is 2 x 10(-4)Omega cm(2) after a simple voltage stress. The authors have also deposited Ge3Cu/pt/Au onto p-ZnSe and p-ZnMgSSe, and found that the specific contact resistance is 8 x 10(-5) Omega cm(2) and 3.8 x 10(-5) Omega cm(2) for the as-deposited Cu3Ge/Pt/Au contacts on top of the p-ZnSe and pZnMgSSe, respectively. It was also found that the Cu3Ge/Pt/Au on p-ZnSe is much more stable than the Cu3Ge/Pt/Au on p-ZnMgSSe.
引用
收藏
页码:1280 / 1281
页数:2
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