Thermal conductivity of thin metallic films measured by photothermal profile analysis

被引:128
作者
Langer, G [1 ]
Hartmann, J [1 ]
Reichling, M [1 ]
机构
[1] FREE UNIV BERLIN,FACHBEREICH PHYS,D-14195 BERLIN,GERMANY
关键词
D O I
10.1063/1.1147638
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Thermal conductivity of nickel and gold films on quartz (thickness 0.4-8 mu m) was measured by a modulated thermoreflectance technique recording the surface temperature profile. Model calculations predict an optimum frequency for measuring thermal transport within the film. Measurements on films with various thicknesses reveal a thermal conductivity close to the bulk value for nickel while gold films exhibit a reduced conductivity with decreasing film thickness. (C) 1997 American Institute of Physics.
引用
收藏
页码:1510 / 1513
页数:4
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