Thermography on a suspended microbridge using confocal Raman scattering

被引：20

作者：

Jungen, Alain ^{[1
]}

Stampfer, Christoph ^{[1
]}

Hierold, Christofer ^{[1
]}

机构：

[1] ETH, CH-8092 Zurich, Switzerland

来源：

APPLIED PHYSICS LETTERS | 2006年 / 88卷 / 19期

关键词：

D O I：

10.1063/1.2202095

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Confocal Raman scattering to perform submicron spatial resolution thermography on suspended microbridges was carried out by tracking the frequency shift of the Raman-active first-order optical phonon mode of polycrystalline silicon. The measurements reveal that microsystem design allows the definition of structures with very high thermal gradients of about 50 K/mu m. The Thomson effect is pronounced in such structures and was actually sensed at different temperatures. Fluorescence measurements at elevated temperatures confirm the observation of this secondary effect. (c) 2006 American Institute of Physics.

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