Magnetic induction and plasma impedance in a cylindrical inductive discharge

被引：48

作者：

Gudmundsson, JT

Lieberman, MA

机构：

[1] UNIV CALIF BERKELEY,DEPT NUCL ENGN,BERKELEY,CA 94720

[2] UNIV CALIF BERKELEY,DEPT ELECT ENGN & COMP SCI,BERKELEY,CA 94720

来源：

PLASMA SOURCES SCIENCE & TECHNOLOGY | 1997年 / 6卷 / 04期

关键词：

D O I：

10.1088/0963-0252/6/4/012

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

An inductive radio frequency discharge in the cylindrical configuration is modelled as a transformer with the inductive coil taken as the primary circuit and the plasma as the secondary circuit. The mutual inductance between the primary and secondary circuit, the self-inductance of the plasma and the impedance of the plasma are determined theoretically and related to the properties of the plasma evaluated using a global (volume-averaged) discharge model for argon plasma. The azimuthal electric field and the axial magnetic field profile within an inductive discharge in the cylindrical configuration are determined assuming a parabolic electron density profile.

引用

页码：540 / 550

页数：11

共 30 条

[1] HIGH-DENSITY PLASMA MODE OF AN INDUCTIVELY COUPLED RADIO-FREQUENCY DISCHARGE [J].