Deposition of hydrocarbon films by means of helium-ethylene fed glow dielectric barrier discharges

被引：37

作者：

Fanelli, F ^{[1
]}

Fracassi, F ^{[1
]}

d'Agostino, R ^{[1
]}

机构：

[1] Univ Bari, Dipartimento Chim, IMIP, CNR, I-70126 Bari, Italy

来源：

PLASMA PROCESSES AND POLYMERS | 2005年 / 2卷 / 09期

关键词：

atmospheric pressure glow discharges (APGD); glow dielectric barrier discharges (GDBD); ethylene; plasma enhanced chemical vapor deposition (PECVD);

D O I：

10.1002/ppap.200500057

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The present work provides a detailed study of helium-ethylene dielectric barrier glow discharges. The effect of ethylene concentration, total gas flow rate, excitation frequency and applied voltage have been investigated in order to clarify both discharge operational mode, and coating composition. The discharge has been characterized by means of electrical measurements and optical emission spectroscopy, while the stable species contained in the gas effluent have been sampled and analyzed using gas chromatography with mass spectrometry detection to achieve indications on the reactive fragments generated inside the discharge. It has been observed that polyethylene-like coatings can be obtained for a wide range of electrical conditions, and the deposition rates have been found to range between 20 and 80 nm min(-1).

引用

页码：688 / 694

页数：7

共 43 条

[1] Dual-mode plasma-enhanced chemical vapor deposition (PECVD) of polymer-like a-C:H films: Vibrational and optical properties [J].