Application of atmospheric pressure dielectric barrier discharges in deposition, cleaning and activation

Dielectric barrier discharges (DBDs) at atmospheric pressure are obtained using mixtures of He and Ar as carrier gasses and various reactive additives such as hydrocarbons, hydrogen and nitrogen. These DBDs are used in three applications: deposition of polymer films; cleaning of Ag and Cu substrates; and activation of polyurethane and steel surfaces. In the case of the film deposition, several process conditions are investigated and the resulting films are analysed by scanning electron microscope, Fourier transform infrared spectroscopy and NMR. In another series of experiments Ag and Cu surfaces, covered with sulfide and oxide layers, are treated by means of a DBD in helium or argon with hydrogen added, The surfaces are analysed with X-ray photoelectron spectroscopy. Finally, a He-N-2 plasma is used as an activator of polyurethane. (C) 2001 Elsevier Science B.V. All rights reserved.