Vibrational properties and microstructure of reactively sputtered hydrogenated carbon nitrides

被引:71
作者
Fanchini, G [1 ]
Tagliaferro, A
Messina, G
Santangelo, S
Paoletti, A
Tucciarone, A
机构
[1] Politecn Torino, Dipartimento Fis, Turin, Italy
[2] Politecn Torino, Unita INFM, Turin, Italy
[3] Univ Reggio Calabria, Dipartimento Meccan & Mat, I-89100 Reggio Di Calabria, Italy
[4] Univ Reggio Calabria, Unita INFM, I-89100 Reggio Di Calabria, Italy
[5] Univ Roma Tor Vergata, Dipartimento Sci & Tecnol Fis & Energet, Rome, Italy
[6] Univ Roma Tor Vergata, Unita INFM, Rome, Italy
关键词
D O I
10.1063/1.1425424
中图分类号
O59 [应用物理学];
学科分类号
摘要
The present study is focused on the vibrational and structural characterization of a set of disordered hydrogenated carbon nitride (a-CN:H) thin films grown by reactive sputtering. A comparative analysis of the experimental results as achieved by Raman and infrared (IR) spectroscopies is made. The disorder-induced features of IR and Raman spectra are discussed as well in light of the current assessment on the vibrational properties of carbon-based materials. Some differences between a-CN:H and nonnitrogenated a-C:H materials are evidenced and attributed to the effects of charge redistribution and bond polarization due to the presence of nitrogen. In order to justify such a hypothesis, the dielectric constant, the dynamic effective charge, and the IR cross section determined by the charge transfer effects are calculated and found to be in agreement with the corresponding experimental values. (C) 2002 American Institute of Physics.
引用
收藏
页码:1155 / 1165
页数:11
相关论文
共 41 条
[1]  
[Anonymous], INTRO SOLID STATE PH
[2]  
ASHCROFT N, 1975, SOLID STATE PHYS, P400
[3]  
BARANOV AV, 1987, OPT SPEKTROSK+, V62, P1036
[4]  
BRODSKY MH, 1977, PHYS REV B, V16, P3556, DOI 10.1103/PhysRevB.16.3556
[5]   USE OF HYDROGENATION IN STRUCTURAL AND ELECTRONIC STUDIES OF GAP STATES IN AMORPHOUS-GERMANIUM [J].
CONNELL, GAN ;
PAWLIK, JR .
PHYSICAL REVIEW B, 1976, 13 (02) :787-804
[6]   PI-BANDS AND GAP STATES FROM OPTICAL-ABSORPTION AND ELECTRON-SPIN-RESONANCE STUDIES ON AMORPHOUS-CARBON AND AMORPHOUS HYDROGENATED CARBON-FILMS [J].
DASGUPTA, D ;
DEMICHELIS, F ;
PIRRI, CF ;
TAGLIAFERRO, A .
PHYSICAL REVIEW B, 1991, 43 (03) :2131-2135
[7]   DETERMINATION OF THE SP(3)/SP(2) RATIO IN A-C-H FILMS BY INFRARED SPECTROMETRY ANALYSIS [J].
DEMARTINO, C ;
DEMICHELIS, F ;
TAGLIAFERRO, A .
DIAMOND AND RELATED MATERIALS, 1995, 4 (10) :1210-1215
[8]  
DISCHLER B, 1987, AMORPHOUS HYDROGENAT, V17, P189
[9]   Localisation and density of states in amorphous carbon-based alloys [J].
Fanchini, G ;
Tagliaferro, A .
DIAMOND AND RELATED MATERIALS, 2001, 10 (02) :191-199
[10]   Interpretation of Raman spectra of disordered and amorphous carbon [J].
Ferrari, AC ;
Robertson, J .
PHYSICAL REVIEW B, 2000, 61 (20) :14095-14107