DETERMINATION OF THE SP(3)/SP(2) RATIO IN A-C-H FILMS BY INFRARED SPECTROMETRY ANALYSIS

被引：32

作者：

DEMARTINO, C ^{[1
]}

DEMICHELIS, F ^{[1
]}

TAGLIAFERRO, A ^{[1
]}

机构：

[1] POLITECN TORINO, DIPARTIMENTO FIS, I-10129 TURIN, ITALY

来源：

关键词：

HYDROGENATED CARBON; IR SPECTROSCOPY; SP(3)/SP(2) DETERMINATION;

D O I：

10.1016/0925-9635(95)00295-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this paper, a method for the determination of the sp(3)/sp(2) ratio for carbon atoms in a-C:H films is presented. First, the infrared analysis of the films is performed and the sp(3)/sp(2) ratio for the hydrogenated carbon atoms is determined. From this value, and making different assumptions for the different types of a-C:H (graphite-, diamond- or polymer-like), the overall sp(3)/sp(2) ratio is determined. The results obtained are in good agreement with NMR data for the types of a-C:H considered.

引用

页码：1210 / 1215

页数：6

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