CHARACTERIZATION OF DIAMOND-LIKE CARBON BY INFRARED-SPECTROSCOPY

被引：147

作者：

GRILL, A

PATEL, V

机构：

[1] IBM Research Division, T. J. Watson Research Center, Yorktown Heights

来源：

APPLIED PHYSICS LETTERS | 1992年 / 60卷 / 17期

关键词：

D O I：

10.1063/1.107098

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Comparison of Fourier transform infrared (FTIR) absorption spectroscopy, high resolution C-13 nuclear magnetic resonance spectroscopy, and hydrogen evaluation by forward recoil elastic scattering (FRES) measurements shows that FTIR cannot be used to determine the carbon hybridization or total hydrogen content of diamondlike carbon films (DLC). FTIR absorption reflects only the optically active hydrogen in the DLC and, using it together with FRES, it can provide an estimate of the unbound hydrogen contained in the films. The fraction of unbound hydrogen can reach values of up to approximately 50%.

引用

页码：2089 / 2091

页数：3

共 14 条

[1] Angus J.C., 1986, PLASMA DEPOSITED THI, P89
[2] STRUCTURE AND PHYSICAL-PROPERTIES OF PLASMA-GROWN AMORPHOUS HYDROGENATED CARBON-FILMS
COUDERC, P
CATHERINE, Y
[J]. THIN SOLID FILMS, 1987, 146 (01) : 93 - 107
[3] BONDING IN HYDROGENATED HARD CARBON STUDIED BY OPTICAL SPECTROSCOPY
DISCHLER, B
BUBENZER, A
KOIDL, P
[J]. SOLID STATE COMMUNICATIONS, 1983, 48 (02) : 105 - 108
[4] HARD CARBON COATINGS WITH LOW OPTICAL-ABSORPTION
DISCHLER, B
BUBENZER, A
KOIDL, P
[J]. APPLIED PHYSICS LETTERS, 1983, 42 (08) : 636 - 638
[5] DISCHLER B, 1987, AMORPHOUS HYDROGENAT, V17, P219
[6] POLYMER-LIKE AND HARD AMORPHOUS HYDROGENATED CARBON-FILMS PREPARED IN AN INDUCTIVELY COUPLED R.F. GLOW-DISCHARGE
DWORSCHAK, W
KLEBER, R
FUCHS, A
SCHEPPAT, B
KELLER, G
JUNG, K
EHRHARDT, H
[J]. THIN SOLID FILMS, 1990, 189 (02) : 257 - 267
[7] GRILL A, 1991, MATER SCI MONOG, V73, P683
[8] TEMPERATURE AND BIAS EFFECTS ON THE PHYSICAL AND TRIBOLOGICAL PROPERTIES OF DIAMOND-LIKE CARBON
GRILL, A
PATEL, V
MEYERSON, BS
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1991, 138 (08) : 2362 - 2367
[9] OPTICAL AND TRIBOLOGICAL PROPERTIES OF HEAT-TREATED DIAMOND-LIKE CARBON
GRILL, A
PATEL, V
MEYERSON, BS
[J]. JOURNAL OF MATERIALS RESEARCH, 1990, 5 (11) : 2531 - 2537
[10] INHOMOGENEOUS CARBON BONDING IN HYDROGENATED AMORPHOUS-CARBON FILMS
GRILL, A
MEYERSON, BS
PATEL, VV
REIMER, JA
PETRICH, MA
[J]. JOURNAL OF APPLIED PHYSICS, 1987, 61 (08) : 2874 - 2877

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